Edwards Vacuum is set to establish a $319 million dry vacuum pump manufacturing plant in the Finger Lakes region, thanks to up to $18 million in direct funding from the Commerce Department under the CHIPS and Science Act, announced on Thursday. This new facility, located in Genesee County, New York, will produce dry vacuum pumps critical for the semiconductor industry and is expected to create approximately 600 jobs.

The investment is part of an effort to bolster the U.S. supply chain for semiconductor manufacturing, as these pumps are essential for both advanced and legacy fabrication plants. Edwards Vacuum initially announced the project in 2022 and commenced its first construction phase in April. The 240,000 square-foot facility will be situated within the Western New York Science & Technology Advanced Manufacturing Park.

The site will encompass manufacturing, warehouse, and administrative spaces, with an initial capacity to produce 10,000 dry pumps annually. It is designed to be an all-electric facility aiming for LEED certification, primarily powered by hydroelectricity.

Dry vacuum pumps play a vital role in semiconductor fabs by maintaining the chamber environment for wafer processing, effectively evacuating toxic fumes and chemicals. Currently, there is no domestic production of semiconductor-grade dry vacuum pumps, with UK-based Edwards' products manufactured in Asia.

“By bringing manufacturing to New York, Edwards customers—including Micron and GlobalFoundries in New York, and Intel in Ohio—will experience shorter wait times, improved responsiveness, and reduced CO2 emissions from an American-made product,” stated New York Governor Kathy Hochul. The company estimates that once phase one is operational, it will cut CO2 emissions by 13,000 tons annually.

Additionally, Edwards Vacuum is collaborating with Genesee Community College for workforce training and participating in the Upstate New York Investing in America Workforce Hub to prepare individuals for jobs within the semiconductor supply chain. The company also plans to leverage the Department of the Treasury’s Investment Tax Credit, allowing it to claim up to 25% of capital expenditures. The Department of Commerce will conduct due diligence before finalizing the award terms.